Measuring the thickness of thin sintered layers precisely

نویسندگان

چکیده

Optical thickness determination with miniaturized spectrometers is a commonly used technique that works quite well in many applications. For sintered materials however, this must be extended by the of optical constants material. This can done using combination scanning electron microscopy and effective medium approaches. In article, we demonstrate for Al2O3 layers quartz tubes.

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ژورنال

عنوان ژورنال: PhotonicsViews

سال: 2023

ISSN: ['2626-1308', '2626-1294']

DOI: https://doi.org/10.1002/phvs.202300013